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Design, Manufacturing and Test of a High-Precision MEMS Inclination Sensor for Navigation Systems in Robot-Assisted Surgery

Received: 29 November 2017     Accepted: 15 January 2018     Published: 1 February 2018
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Abstract

Robot supported minimally invasive interventions are state of the art in operating theatres. To increase the accuracy of surgical instrument positioning, high-precision motion tracking systems are required. The miniaturization of microelectromechanical systems (MEMS) facilitates the placing of orientation detection sensors close to the mounting of the surgical instrument to enhance positioning accuracy. A high resolution inclination sensor was developed using the innovative approach of laser-micro-welding. Trench sizes down to 800 nm are fabricated with more than 6-fold increase in aspect ratios (structure depth to electrode gap) compared to sensors without gap reduction. Electrical and physical tests as well as finite-element-simulations were performed. An increased sensitivity from 7.2 fF/° up to 60 fF/° was verified for the sensor with reduced electrode gap and a customized ASIC.

Published in International Journal of Biomedical Science and Engineering (Volume 6, Issue 1)
DOI 10.11648/j.ijbse.20180601.11
Page(s) 1-6
Creative Commons

This is an Open Access article, distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution and reproduction in any medium or format, provided the original work is properly cited.

Copyright

Copyright © The Author(s), 2018. Published by Science Publishing Group

Keywords

Surgical Robot Navigation, Inertial Sensor, Inclination Sensor, Microelectromechanical System (MEMS), Gap Reduction

References
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Cite This Article
  • APA Style

    Benjamin Arnold, Daniel Wohlrab, Christoph Meinecke, Danny Reuter, Jan Mehner. (2018). Design, Manufacturing and Test of a High-Precision MEMS Inclination Sensor for Navigation Systems in Robot-Assisted Surgery. International Journal of Biomedical Science and Engineering, 6(1), 1-6. https://doi.org/10.11648/j.ijbse.20180601.11

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    ACS Style

    Benjamin Arnold; Daniel Wohlrab; Christoph Meinecke; Danny Reuter; Jan Mehner. Design, Manufacturing and Test of a High-Precision MEMS Inclination Sensor for Navigation Systems in Robot-Assisted Surgery. Int. J. Biomed. Sci. Eng. 2018, 6(1), 1-6. doi: 10.11648/j.ijbse.20180601.11

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    AMA Style

    Benjamin Arnold, Daniel Wohlrab, Christoph Meinecke, Danny Reuter, Jan Mehner. Design, Manufacturing and Test of a High-Precision MEMS Inclination Sensor for Navigation Systems in Robot-Assisted Surgery. Int J Biomed Sci Eng. 2018;6(1):1-6. doi: 10.11648/j.ijbse.20180601.11

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  • @article{10.11648/j.ijbse.20180601.11,
      author = {Benjamin Arnold and Daniel Wohlrab and Christoph Meinecke and Danny Reuter and Jan Mehner},
      title = {Design, Manufacturing and Test of a High-Precision MEMS Inclination Sensor for Navigation Systems in Robot-Assisted Surgery},
      journal = {International Journal of Biomedical Science and Engineering},
      volume = {6},
      number = {1},
      pages = {1-6},
      doi = {10.11648/j.ijbse.20180601.11},
      url = {https://doi.org/10.11648/j.ijbse.20180601.11},
      eprint = {https://article.sciencepublishinggroup.com/pdf/10.11648.j.ijbse.20180601.11},
      abstract = {Robot supported minimally invasive interventions are state of the art in operating theatres. To increase the accuracy of surgical instrument positioning, high-precision motion tracking systems are required. The miniaturization of microelectromechanical systems (MEMS) facilitates the placing of orientation detection sensors close to the mounting of the surgical instrument to enhance positioning accuracy. A high resolution inclination sensor was developed using the innovative approach of laser-micro-welding. Trench sizes down to 800 nm are fabricated with more than 6-fold increase in aspect ratios (structure depth to electrode gap) compared to sensors without gap reduction. Electrical and physical tests as well as finite-element-simulations were performed. An increased sensitivity from 7.2 fF/° up to 60 fF/° was verified for the sensor with reduced electrode gap and a customized ASIC.},
     year = {2018}
    }
    

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    AU  - Benjamin Arnold
    AU  - Daniel Wohlrab
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    AU  - Jan Mehner
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    PY  - 2018
    N1  - https://doi.org/10.11648/j.ijbse.20180601.11
    DO  - 10.11648/j.ijbse.20180601.11
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    JF  - International Journal of Biomedical Science and Engineering
    JO  - International Journal of Biomedical Science and Engineering
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    AB  - Robot supported minimally invasive interventions are state of the art in operating theatres. To increase the accuracy of surgical instrument positioning, high-precision motion tracking systems are required. The miniaturization of microelectromechanical systems (MEMS) facilitates the placing of orientation detection sensors close to the mounting of the surgical instrument to enhance positioning accuracy. A high resolution inclination sensor was developed using the innovative approach of laser-micro-welding. Trench sizes down to 800 nm are fabricated with more than 6-fold increase in aspect ratios (structure depth to electrode gap) compared to sensors without gap reduction. Electrical and physical tests as well as finite-element-simulations were performed. An increased sensitivity from 7.2 fF/° up to 60 fF/° was verified for the sensor with reduced electrode gap and a customized ASIC.
    VL  - 6
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Author Information
  • Department of Microsystems and Biomedical Engineering, Faculty of Electrical Engineering and Information Technology, University of Technology Chemnitz, Chemnitz, Germany

  • Department of Microsystems and Biomedical Engineering, Faculty of Electrical Engineering and Information Technology, University of Technology Chemnitz, Chemnitz, Germany

  • Center for Microtechnologies, University of Technology Chemnitz, Chemnitz, Germany

  • Center for Microtechnologies, University of Technology Chemnitz, Chemnitz, Germany

  • Department of Microsystems and Biomedical Engineering, Faculty of Electrical Engineering and Information Technology, University of Technology Chemnitz, Chemnitz, Germany

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